Planar Metal Sputtering Targets

• Manufacturing processes

  Manufacturing processes depend on the properties of the target material and its application.

  We have (Vacuum melting, Rolling, Vacuum spraying, Atmospheric spraying, Vacuum hot pressing, Hot Isostatic Pressing (HIP), Cold Isostatic Pressing +Various atmosphere sintering technology, Low temperature metal, Vacuum hot pressing sintering technology, Electron beam melting, Zone melting purification, Vacuum directional solidification technology, etc).

   

  For metal and alloy target, we adopt Vacuum melting, Rolling, Low temperature metal,Vacuum hot pressing sintering, Electron beam melting, Zone melting purification, Vacuum directional solidification technology.

  
  

• Both Planar and Rotary target available

  Planar target

  Planar targets mainly refer to circular targets and rectangular targets with certain thickness. The plane target material is connected with sputtering equipment by means of thread, the sputtering film layer is attached to the substrate under vacuum conditions, and then the film is processed by various methods to meet different needs.

   

  Rotary target
  Rotary target is a magnetically controlled target. The target is shaped like a cylinder containing a stationary magnet for rotation. Its advantage is high utilization rate, the disadvantage is high cost.

  
  

  Reference size

  * Maximum sizes of planar target

     Thickness: 30mm (can be 60mm for round target)

     Width: max 2000mm

     Length: max 4000mm

   

  * Maximum sizes of rotary target

     Vacuum/Air Spraying

     Backing tubes: ID56 x OD64 x Length300~3000mm, Thickness: 3~5mm

     Backing tubes: ID78~83 x OD89~92 x Length300~3000mm, Thickness: 3~7mm

     Backing tubes: ID100 x OD108 x Length300~3000mm, Thickness: 3~8mm

     Backing tubes: ID125 x OD133 x Length300~4000mm, Thickness: 3~13mm

    

   Bonding

   Backing tubes: ID125 x OD133 x Length500~4000mm, Thickness: 8~13mm

  
  

  * Maximum sizes of planar target

     Thickness: 30mm (can be 60mm for round target)

     Width: max 2000mm

     Length: max 4000mm

   

  * Maximum sizes of rotary target

     Vacuum/Air Spraying

     Backing tubes: ID56 x OD64 x Length300~3000mm, Thickness: 3~5mm

     Backing tubes: ID78~83 x OD89~92 x Length300~3000mm, Thickness: 3~7mm

     Backing tubes: ID100 x OD108 x Length300~3000mm, Thickness: 3~8mm

     Backing tubes: ID125 x OD133 x Length300~4000mm, Thickness: 3~13mm

    

   Bonding

   Backing tubes: ID125 x OD133 x Length500~4000mm, Thickness: 8~13mm

Planar/Rotary target can be customized as per your request.